Measuring standard
Coefficient of linear expansion
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Two-coordinate TITANID phase grating on glass; grating period 8 µm
?therm 8 x 10–6 K–1
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Accuracy grade
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±2 µm
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Measuring range
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68 mm x 68 mm,
other measuring ranges upon request
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Reference marks1)
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One reference mark in each axis, 3 mm after beginning of measuring length
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Interface
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1 VPP
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Signal period
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4 µm
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Cutoff frequency –3 dB
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? 300 kHz
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Traversing speed
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? 72 m/min
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Interpolation error
Position noise RMS
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±12 nm3)
2 nm (450 kHz2))
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Electrical connection
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0.5 m cable with 15-pin D-sub connector (male); interface electronics in connector
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Cable length
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See interface description, but ? 30 m (with HEIDENHAIN cable)
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Power supply
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DC 5 V ±0.25 V
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Current consumption
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< 185 mA per axis
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Vibration 55 Hz to 2000 Hz
Shock 11 ms
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? 80 m/s2 (EN 60068-2-6)
? 100 m/s2 (EN 60068-2-27)
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Operating temperature
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0 °C to 50 °C
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Mass Scanning head
Grid plate
Connecting cable
Connector
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170 g (without cable)
75 g
37 g/m
140 g
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1) The reference mark signal deviates in its zero crossovers from the interface specification (see Mounting Instructions)
2) –3 dB cutoff frequency of the subsequent electronics
3) With HEIDENHAIN interface electronics, e.g. EIB 741 |
