Specifications | LIP 481 V | LIP 481 U |
Areas of application | High vacuum, up to 1 · 10–7 mbar | Ultrahigh vacuum, up to 1 · 10–11 mbar |
Measuring standard* Coefficient of linear expansion | SUPRADUR phase grating on glass or Zerodur glass ceramic Glass: ?therm 8 · 10–6 K–1; Zerodur glass ceramic: ?therm (0 ± 0.1) · 10–6 K–1 |
Accuracy grade* | ±1 µm, ±0.5 µm |
Baseline error | ? ±0.175 µm/5 mm |
Measuring length ML* in mm | 70 120 170 220 270 320 370 420 |
Reference marks | One at midpoint of measuring length |
Output signals | 1 VPP |
Signal period | 2 µm |
Cutoff frequency –3 dB | ? 300 kHz |
Traversing speed | 36 m/min |
Interpolation error Position noise RMS | ±7 nm 2 nm (450 kHz) |
Supply voltage Current consumption | DC 5 V ±5% < 190 mA |
Electrical connection | 15-pin D-sub connector (male); interface electronics integrated in connector |
Housing feed-through* (see page 4) | None (interface electronics in a vacuum) | D-sub connector (not included in delivery; interface electronics not in a vacuum) |
Cable length of scanning head to APE* | 0.5 m or 1 m | 0.5 m or 1 m to the housing feed-through and 0.5 m to the APE |
Other cable lengths on request, but ? 3 m between scanning head and APE |
Cable length after APE | ? 20 m (with HEIDENHAIN cable) |
Vibration 55 Hz to 2000 Hz Shock 11 ms | ? 200 m/s2 (EN 60068-2-6) ? 500 m/s2 (EN 60068-2-27) |
Operating temperature | 0 °C to 40 °C | |
Baking temperature | 100 °C | 120 °C |
Materials | PCB: Ceramic Adhesives: UHV-compatible, temperature resistant |
Mass Scanning head Connector Scale Connecting cable | 50 g (without cable) 32 g; with integrated interface electronics: 140 g 5.6 g + 0.2 g/mm measuring length 38 g/m |
* Please select when ordering |
