Specifications
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LIP 382
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Measuring standard
Coefficient of linear expansion
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DIADUR phase grating on Zerodur glass ceramic; grating period 0.512 µm
?therm = (0±0.1) x 10–6 K–1
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Accuracy grade
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±0.5 µm (higher accuracy grades upon request)
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Baseline error
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? ±0.075 µm/5 mm
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Measuring length ML* in mm
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70 120 150 170 220 270
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Reference marks
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No
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Interface
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1 VPP
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Integrated interpolation
Signal period
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–
0.128 µm
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Cutoff frequency –3 dB
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? 1 MHz
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Scanning frequency*
Edge separation a
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–
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Traversing speed
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? 7.6 m/min
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Interpolation error
Position noise RMS
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±0.01 nm
0.06 nm (1 MHz1))
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Laser
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Scanning head and scale mounted: Class 1
Scanning head not mounted: Class 3B
Laser diode used: Class 3B
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Electrical connection
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0.5 m cable to interface electronics (APE), separate adapter cable (1 m/3 m/6 m/9 m)
connectable to APE
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Cable length
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See interface description, but ? 30 m (with HEIDENHAIN cable)
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Power supply
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DC 5 V ±0.25 V
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Current consumption
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< 190 mA
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Vibration 55 Hz to 2000 Hz
Shock 11 ms
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? 4 m/s2 (EN 60068-2-6)
? 50 m/s2 (EN 60068-2-27)
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Operating temperature
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0 °C to 40 °C
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Mass Scanning head
Interface electronics
Linear scale
Connecting cable
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150 g
100 g
ML 70 mm: 260 g, ML ? 150 mm: 700 g
38 g/m
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* Please select when ordering
1) –3 dB cutoff frequency of the subsequent electronics |
